Stationary beam full-field transmission helium ion microscopy using sub-50 keV He⁺: Projected images and intensity patterns

• Michael Mousley,
• Santhana Eswara,
• Olivier De Castro,
• Olivier Bouton,
• Nico Klingner,
• Christoph T. Koch,
• Gregor Hlawacek and
• Tom Wirtz

Beilstein J. Nanotechnol. 2019, 10, 1648–1657, doi:10.3762/bjnano.10.160

• information from other ion images such as HIM SE images or the THIM images shown here. Finally, it should be noted that future investigations of intensity distribution from transmitted ion experiments in search of transmitted ion diffraction and other new scattering or deflection phenomena should be done

• impact on the final intensity distribution in the far field. Hence, the different processes contributing to the final intensities will need to be understood in order to decouple and study the relevant ion-beam scattering and deflection phenomena. Keywords: charging; helium ion microscopy; ion

• diffraction; ion scattering; transmission ion microscopy; Introduction The use of helium ions for microscopy and nanoanalysis is gaining popularity due to the availability of the high-brightness gas field ion source (GFIS) [1]. Due to the high brightness, the probe from a GFIS can be focused into a spot of